AMAT 0010-44968 Power Distribution Module
Applied Materials Power Distribution Unit
Overview
The AMAT 0010-44968 is a high-performance power distribution module designed for use in Applied Materials semiconductor manufacturing equipment. This critical component provides reliable power management and distribution for various subsystems within semiconductor processing tools, ensuring stable and controlled power delivery to sensitive equipment.
Engineered to meet the stringent requirements of semiconductor manufacturing environments, the 0010-44968 features robust construction, comprehensive protection mechanisms, and advanced monitoring capabilities. Its modular design allows for easy integration and maintenance, making it an essential component in Applied Materials' equipment architecture.
Specifications
Input Specifications
- Input Voltage: 200-240V AC, 3-phase
- Input Frequency: 50/60 Hz
- Input Current: 30A maximum per phase
- Input Power: 12kW maximum
- Power Factor: 0.95 minimum
Output Specifications
- Output Channels: 8 isolated outputs
- Output Voltage: 24V DC, 48V DC, 110V AC
- Output Current: 5A to 20A per channel
- Voltage Regulation: ±1% typical
- Ripple & Noise: <50mV peak-to-peak
Electrical Protection
- Overcurrent Protection: Electronic circuit breakers
- Overvoltage Protection: Transient voltage suppressors
- Undervoltage Protection: Monitoring circuits
- Short Circuit Protection: Crowbar circuits
- Ground Fault Protection: 30mA sensitivity
Environmental Specifications
- Operating Temperature: 0°C to 50°C
- Storage Temperature: -40°C to 70°C
- Humidity: 10% to 80% non-condensing
- Altitude: Up to 2000 meters
- Cleanliness: ISO Class 5 compatible
Physical Specifications
- Dimensions: 356 x 279 x 127 mm
- Weight: 4.5 kg (approx.)
- Mounting: 19" rack mount, 3U height
- Enclosure: Aluminum with EMI shielding
- Cooling: Forced air via internal fans
Monitoring & Control
- Communication Interface: RS-485, Ethernet
- Protocols: Modbus RTU/TCP, Ethernet/IP
- Monitoring: Voltage, current, temperature
- Control: Remote on/off, current limiting
- Alarms: Visual and remote notification
Features
Multi-Voltage Output Configuration
Provides multiple isolated output channels with different voltage levels (24V DC, 48V DC, 110V AC) to power various subsystems within semiconductor processing equipment from a single module.
Advanced Power Monitoring
Comprehensive power monitoring capabilities including real-time voltage, current, power, and energy consumption measurements for each output channel. Enables predictive maintenance and energy usage optimization.
Redundant Design
N+1 redundancy options available for critical applications. Hot-swappable components minimize downtime during maintenance or fault conditions. Ensures continuous operation of semiconductor manufacturing processes.
Comprehensive Protection
Multi-layered protection mechanisms including overcurrent, overvoltage, undervoltage, short circuit, and ground fault protection. Transient voltage suppression safeguards sensitive equipment from power surges and spikes.
Remote Management
Ethernet and RS-485 communication interfaces enable remote monitoring, control, and configuration. Supports industry-standard protocols for seamless integration with factory automation systems.
Clean Room Compatible
Designed and constructed to meet ISO Class 5 clean room requirements. Sealed enclosure with filtered cooling prevents particle contamination in semiconductor manufacturing environments.
Modular Construction
Modular design allows for easy maintenance and upgradeability. Field-replaceable components minimize downtime and extend equipment lifecycle. Supports future technology upgrades without complete replacement.
EMI/RFI Shielding
Advanced electromagnetic interference (EMI) and radio frequency interference (RFI) shielding prevents interference with sensitive semiconductor manufacturing equipment. Complies with international EMC standards.
Applications
Semiconductor Processing Equipment
Ideal for use in Applied Materials' PVD, CVD, etch, and clean equipment. Provides reliable power distribution for process chambers, robotics, and control systems in semiconductor manufacturing.
Flat Panel Display Manufacturing
Well-suited for flat panel display manufacturing equipment including deposition systems, lithography tools, and inspection systems. Provides stable power for precision manufacturing processes.
Solar Cell Production
Suitable for solar cell manufacturing equipment including PECVD systems, sputtering tools, and diffusion furnaces. Provides reliable power for high-precision deposition and processing equipment.
Advanced Packaging
Perfect for advanced packaging equipment including wire bonders, die bonders, and encapsulation systems. Provides stable power for precision positioning systems and process control equipment.
MEMS Fabrication
Designed for MEMS (Micro-Electro-Mechanical Systems) fabrication equipment. Provides clean, stable power for sensitive etching, deposition, and release processes.
Industrial Automation
Excellent for general industrial automation applications requiring reliable power distribution with monitoring capabilities. Suitable for factory automation, robotics, and process control systems.
Technical Details
Power Conversion
- Topology: Switch-mode power supply
- Efficiency: 92% minimum at full load
- Switching Frequency: 50-100kHz
- Power Factor Correction: Active PFC
Output Configuration
- 24V DC Outputs: 4 channels, 10A each
- 48V DC Outputs: 2 channels, 5A each
- 110V AC Outputs: 2 channels, 20A each
- Isolation: 2kV between outputs
Monitoring Parameters
- Voltage Monitoring: ±0.5% accuracy
- Current Monitoring: ±1% accuracy
- Temperature Monitoring: 3 sensors
- Energy Monitoring: kWh metering
Interface Details
- Ethernet: 10/100Base-T, RJ45 connector
- RS-485: Terminal block connection
- Digital I/O: 8 inputs, 8 outputs
- Analog Inputs: 4 channels for external sensors
Control Features
- Remote On/Off: Per channel control
- Current Limiting: Programmable per channel
- Sequence Control: Programmable power-up/down
- Fault Response: Configurable shutdown behavior
Certifications & Standards
- Safety: UL 60950-1, IEC 60950-1
- EMC: EN 55022, FCC Part 15 Class A
- Environmental: RoHS 2011/65/EU
- Semiconductor: SEMI S2, SEMI S8
Additional Information
Installation & Maintenance
The AMAT 0010-44968 power distribution module is designed for rack mounting in standard 19" equipment racks. Proper cooling must be provided to maintain optimal operating temperature. The module should be installed by qualified personnel following all safety precautions and local electrical codes.
Regular maintenance includes periodic inspection of connections, cleaning of air filters, and verification of cooling fan operation. The module features hot-swappable circuit breakers and fuses for quick replacement without powering down the entire system. Firmware updates can be performed remotely through the Ethernet interface.
For optimal performance, the module should be operated within the specified temperature and humidity ranges. The enclosure should be kept free of dust and debris to ensure proper cooling. Any modifications to the module must be approved by Applied Materials to maintain compliance with safety and performance specifications.
Applied Materials, Inc.
Semiconductor Equipment and Services
Document Number: 0010-44968-DOC
Last Updated: 2025
